Niobium target
Commodity: Niobium target
Standard: ASTM B393-89
Dimension: Φ(25-400)mm*(3-28)mm
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Niobium sputtering target
Material: RO4200-1, RO4210-2
Size:
circular targets: Diameter 25mm up to 400mm x Thickness 3mm up to 28mm
rectangular targets: Thickness 1mm up to 12.7mm x Width up to 600mm x Length up to 2000mm
Purity: >=99.9% or 99.95%
Table 1: technology parameter
|
Recrystallization |
95%min |
|
Grain size |
ASTM 4 or finer |
|
Surface finish |
16Rms max. or Ra 0.4 ( RMS64 or better) |
|
Flatness |
0.1mm or 0.15% max |
|
Tolerance |
+/-0.010" on all dimensions |
|
Purity |
99.99% |
Table.1 Chemical composition:
|
Chemistry PPM |
|
Designation |
Chief component |
Impurities maxmium |
|
Nb |
Ta |
Si |
Ni |
W |
Mo |
Ti |
Fe |
O |
C |
H |
N |
|
Nb1 |
Remainder |
700 |
50 |
50 |
50 |
30 |
20 |
50 |
150 |
40 |
15 |
30 |
|
Nb2 |
Remainder |
1000 |
80 |
40 |
100 |
100 |
40 |
80 |
180 |
60 |
15 |
50 |
Special requirements to be agreed on by the supplier and buyer of negotiations